Electron Probe MicroAnalyzer

EPMA (Electron Probe MicroAnalyzer) can be regarded as a scanning electron microscope equipped with wavelength-dispersive spectrometers (WDS) and with a beam current regulation system.

It allows quantitative chemical analysis at the micrometer scale of the elements between boron and uranium by comparison with reference standards, as well as the acquisition of elemental maps. With this non-destructive technique, detection limits of around 100 ppm can be obtained.

The SCMEM is equipped with a CAMECA SX100 electron microprobe.

Technical specifications:

• tungsten filament gun
• 5 WDS vertical spectrometers
• BSE detector

Application examples:

Na zoning in a plagioclase crystal

Study of the alteration of an archaeological glass

BSE

Picture 1: Si Ka - Picture 2: P Ka - Picture 3: Ca Ka